The cleanroom is of class 10.000, which is the ISO7 standard.
The room is equiped with:
- A Spin Coater
- In-house made UV lithography light source
- Collection of SU-8 photoresist
- SU-8 2025
- SU-8 2050
- Which can give masks with thicknesses from 22 um to 80 um and for to 40 um to 170 um, respectively