Cleanroom

The cleanroom is of class 10.000, which is the ISO7 standard.

The room is equiped with:

• A Spin Coater
• In-house made UV lithography light source
• Collection of SU-8 photoresist
  • SU-8 2025
  • SU-8 2050
  • Which can give masks with thicknesses from 22 um to 80 um and for to 40 um to 170 um, respectively