Cleanroom

The cleanroom is of class 10.000. Which is the ISO7 standard.

The room is equiped with:

  • A Spin Coater
  • In House made UV lithography light source
  • Collection of SU-8 photoresist
    • SU-8 2025
    • SU-8 2050
    • Which can give masks with thicknesses from 22 um to 80 um and for to 40 um to 170 um, respectively